Nano & Surface Analysis Techniques

Techniques Characteristics JEOL
JSM-7001F
FE-SEM/EDS
JEOL
JSM-6010LV
SEM/EDS

 

Perkin Elmers
PHI-5600
small spot XPS

 

Perkin Elmers
PHI-600
SAM/SIMS
Field Emission Scanning Electron Microscopy w/ Energy Dispersive Spectroscopy Scanning Electron Microscopy w/ Energy Dispersive Spectroscopy X-ray Photoelectron Spectroscopy (XPS) Auger Electron Spectroscopy/ Scanning Auger Multiprobe
(AES-SAM)
Secondary Ion Mass Spectrometry (SIMS)
Probe electrons electrons x-ray electrons ions
Detected Particles electrons and photons electrons and photons electrons electrons +ve or -ve ions
Range B and higher B and higher Li and higher Li and higher 1 - 511 amu
Sampling Depth 0.5 – 5 µm 0.5 – 5 µm 10 - 50 Å 4 - 30 Å 20 - 50 Å
Detection Limit* 0.5 to 2.0 at% 0.5 to 2.0 at% 0.1 to 1.0 at% 0.1 to 1.0 at% ppm to ppb
Depth Profiling (Speed and Type) N/A N/A fast, argon ions fast, argon ions fast, argon/oxygen
Information elemental elemental elemental, chemical elemental, some chemical elemental, some structural
Quantitative semi semi semi semi not usually
Probe Spatial Resolution 1.2 nm 4.0 nm 75 µm ~35 nm 200 µm to 1 mm
Advantages excellent spatial resolution

 

elemental mapping

 

 

excellent spatial resolution

 

elemental mapping

 

 

 

few limitations on sample type

 

chemical state information

 

low damage to sample

 

good spatial resolution

 

elemental mapping

 

analyzing conductors and semiconductors
excellent sensitivity

 

isotope and hydrogen detection

 

Disadvantages poor depth resolution poor depth resolution cannot raster probe

 

cannot map

 

charging with insulators

 

electron beam damage

 

destructive (sputtering from probe)

 

matrix effects

 

Acquisition Types survey, line scan, multiple point survey, map, SE-BSE imaging survey, line scan, multiple point survey, map, SE-BSE imaging survey,
multiplex,
depth profile
survey, multiplex, map, line scan, multiple point survey,
depth profile,
SE-BSE imaging
survey, multiplex, map, line scan,
depth profile,
SE imaging


* Detection limit varies by element